DISCHARGE ELECTRODE UNIT, DISCHARGE ELECTRODE ASSEMBLY, AND DISCHARGE TREATMENT DEVICE

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PROBLEM TO BE SOLVED : To provide a structure which generates uniform discharge in discharge direction and is improved in discharge efficiency. SOLUTION : The discharge electrode units 9, 10 are provided with electrodes 2, 3 and solid dielectrics to cover the electrodes 2, 3, and the discharge side surface of the solid dielectrics is made of an oxide containing a rare earth element. Furthermore, a discharge electrode assembly 100 is made of two discharge electrode units and these discharge electrode units are opposed to each other. A discharge treatment device generates plasma using the discharge electrode assembly. By these, discharge efficiency is improved and corrosion resistance to plasma of the discharge side surface of the discharge electrode unit is improved. COPYRIGHT : (C)2009, JPO&INPIT