High purity aluminum nitride powder and its manufacturing method and high purity aluminum nitride si

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PROBLEM TO BE SOLVED : To provide aluminum nitride powder exhibiting excellent heat conductivity. SOLUTION : The high purity aluminum nitride powder contains ≤50 wt.ppm each of Si and an alkaline earth metal, ≤15 wt.ppm each of Fe, Ti, K, Na and a rare earth element, ≤1.5 wt.% oxygen and ≤0.15 wt.% carbon. COPYRIGHT : (C)2004, JPO&NCIPI