PROCESS FOR FABRICATING HIGH TEMPERATURE SUPERCONDUCTING BONDING ELEMENT UTILIZING PHASE SEPARATION

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PROBLEM TO BE SOLVED : To make a joint in the process for producing a superconducting joint by forming a high temperature supercondicting thin film of three layer structure including a rare earth normal conducting phase, separating the phase by partially melting the thin film of three layer structure and forming a normal conducting layer on the supercondicting thin film. SOLUTION : A three layer structure thin film of normal conducting layer/supercondicting layer/normal conducting layer is deposited. Patterning is performed by etching, or the like, to have an inclination. The superconducting thin film is melted partially and a normal conducting layer is formed. Thickness of the normal conducting layer is controlled by etching. A supercondicting thin film is deposited as an upper electrode. COPYRIGHT : (C)2008, JPO&INPIT