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Methods for producing metal/metalloid oxide particles comprising rare earth metals include reacting a reactant stream in a gas flow. The reactant stream includes a rare earth metal precursor and an oxygen source. The invention further provides a collection of particles comprising metal/metalloid oxide having an average particle size from about 15nm to about 1 micron. The metal/metalloid oxide comprises a non-rare earth metal oxide wherein less than about 25 weight percent of a non-rare earth metal is substituted with a rare earth metal. The particules are useful as phsphors, for example for use in displays. Figure 20 is an x-ray diffractogram representative of a sample of the invention.