CERIUM-BASED ABRASIVE SLURRY AND METHOD FOR PRODUCING CERIUM-BASED ABRASIVE SLURRY

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PROBLEM TO BE SOLVED : To provide a cerium-based abrasive slurry which is excellent in abrasive force and abrasive accuracy and does not adhere abrasive particles to abraded surfaces, after abraded, and to provide a method for producing the cerium-based abrasive slurry. SOLUTION : This cerium-based abrasive slurry which contains cerium-based abrasive particles having a total rare earth element oxide (TREO) content of 95 wt.% is characterized in that the cerium-based abrasive particles have a fluorine content of <3 wt.% based on TREO and has particle distributions in prescribed ranges by laser diffraction method. When the fluorine content is 0.005 to 0.5 wt.% based on TREO, the adhesiveness can further be improved. COPYRIGHT : (C)2008, JPO&INPIT