WIRING AND ELECTRODE FOR LIQUID CRYSTAL DISPLAY DEVICE EXCELLENT IN ADHESION WITHOUT CAUSING THERMAL

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PROBLEM TO BE SOLVED : To provide a thin copper alloy film for forming a wiring and an electrode of a liquid crystal display device. SOLUTION : The wiring and the electrode for the liquid crystal display device, which are excellent in adhesion without causing any thermal defect, is composed of the thin copper alloy film having the composition containing a total of 0.01-1 atom % of one or two or more kinds of Ag, Ca, Mg, and Zn, 0.1-2 atom % of oxygen, a total of 0.01-1 atom % of one or two or more kinds of rare earth elements if necessary, and the balance Cu with inevitable impurities. COPYRIGHT : (C)2008, JPO&INPIT