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PROBLEM TO BE SOLVED : To improve reliability of an insulating film for insulating a thin-film heater from a radiation prevention film.
SOLUTION : A reactor heating device 30 includes a thin-film heater 32 provided on the surface of a reactor 20, an insulating film 37 for covering the thin-film heater 32, and a radiation prevention film 38 provided on the insulating film 37. The insulating film 37 comprises crystalline RFeO3, wherein R is a rare earth element. The reactor forms the insulating film 37 with the coefficient of linear expansion equivalent to metal evenly by an application method, and generates no crack or peeling on the film even operated at a high temperature, thereby improving the reliability in electric insulation for insulating the thin film heater 32 from the radiation prevention film 38.
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