ELECTRODE STRUCTURE, AND PLASMA GENERATING DEVICE USING IT

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PROBLEM TO BE SOLVED : To provide an electrode structure excellent in corrosion resistance to atmospheric plasma, and a plasma generating device using it. SOLUTION : This electrode structure is used in the plasma generating device 11, and is equipped with an electrode 1 to generate plasma, and a silicate layer 2a having disilicate expressed by RE2Si2O7(RE is a rare earth element), or monosilicate expressed by RE2SiO5 (RE is a rare earth element) as a main crystal phase is formed on the surface of a plasma generating region 4 side. COPYRIGHT : (C)2008, JPO&INPIT