WIRING AND ELECTRODE FOR LIQUID CRYSTAL DISPLAY DEVICE CAUSING LESS HEAT DEFECT AND PREFERABLE SURFA

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PROBLEM TO BE SOLVED : To provide wiring and electrodes for a liquid crystal display device comprising a copper alloy thin film causing no heat defects such as hillock and void and having a preferable surface state, and to provide a sputtering target to form the wiring and electrodes. SOLUTION : The wiring and electrodes for a liquid crystal display device causing less heat defects and a preferable surface state consist of copper alloy thin films having a composition containing rare earth elements (Y, La, Ce) by 0.01 to 3 atomic%, Ag by 0.01 to 4 atomic% and the rest comprises Cu and inevitable impurities. A sputtering target to form the wiring and electrodes has the above composition. COPYRIGHT : (C)2008, JPO&INPIT