Thermal spray powder, method for forming thermal spray coating, and plasma resistant member

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PURPOSE : A thermal spray powder, a method for forming thermal spray coating, and a plasma resistant member provided to improve the quality of thermal spray coating by allowing thermal spray powder to have a high fluidity. CONSTITUTION : A thermal spray powder comprises granulated and sintered particles containing oxide of one rare earth of elements having an atomic number of 60 to 70. A primary particle, which constitutes the granulated and sintered particles, has an average grain size of 2μm to 10μm. The granulated and sintered particles have a crushing strength of 7MPa to 50MPa. A ratio of general specific gravity to true specific gravity of the thermal spray powder is 0.10 to 0.30. A frequency distribution of pores in the granulated and sintered particles has a local maximum value within the range of 1μm or more. The thermal spray powder is subject to plasma thermal spray coating, thereby forming thermal spray coating. © KIPO 2008