RARE EARTH OXIDE-CONTAINING THERMAL-SPRAYED SUBSTRATE, AND METHOD FOR PRODUCING THE SAME

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PROBLEM TO BE SOLVED : To provide a thin sheet of rare earth-containing oxide ceramics used, e.g., for a model material requiring reaction resistance, heat resistance, wear resistance, corrosion resistance, plasma resistance, chemical resistance or the like, and to provide a production method capable of easily producing the thin sheet of rare earth-containing oxide ceramics. SOLUTION : The method for producing a rare earth oxide-containing thermal-sprayed substrate with a thickness of ≤5 mm is characterized in that a base material is thermal-sprayed with a rare earth-containing oxide at a thickness of ≤5 mm, and thereafter, the sprayed coating is peeled from the base material. According to this invention, a thin sheet of rare earth-containing oxide ceramics can be easily produced by performing thermal spraying to a base material with prescribed dimensions without compacting, firing and sintering stages. Further, according to the selection of a base material shape, thin sheets with various shapes such as a polygonal shape, a disk shape, a ring shape and a triangular shape can be easily produced. Further, by performing thermal spraying to a base material in which a plurality of holes are made, a thermal-sprayed thin sheet in which a plurality of holes are bored can be produced as well. COPYRIGHT : (C)2009, JPO&INPIT