CERAMIC HEATER

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PROBLEM TO BE SOLVED : To provide a ceramic heater composed by restraining a crack, breakage, corrosion and strength degradation. SOLUTION : This ceramic heater obtained by embedding a heating element, which mainly contains at least one kind out of silicides, nitrides and carbides of Mo, and silicides, nitrides and carbides of W, in a base mainly containing silicon nitride. This ceramic heater is characterized in that porosity of the base is not larger than 5%; the base contains 4-25 mass% of an rare earth element in terms of oxide, and contains a silicide and/or silicon carbide in conditions such as (1) 0.6≤A≤10 and 0≤B≤10, or (2) 2≤B≤10 and 0≤A≤10 when it is assumed that the content of the silicide and that of the silicon carbide are A vol.% and B vol.%, respectively; and the maximum particle diameter of the silicide and the silicon carbide is not larger than 15 μm in all of the case where the silicon carbide is not present and the silicide is present on the surface layer part of the base, the case where the silicide is not present and the silicon carbide is present on the surface layer part of the base, and the case where the silicide and the silicon carbide are present on the surface layer part of the base. COPYRIGHT : (C)2009, JPO&INPIT