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The halide-based member oxystyrene

2025-06-20 05:273620下载
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PROBLEM TO BE SOLVED : To obtain an oxyhalide-based member imparted with high corrosionproofness by making portions thereof to be subjected to exposure to halogen-based corrosive gases or plasma thereof including fluorine-based ones a sintered compact consisting of an oxide of a rare earth element such as Y and a halogen such as F. SOLUTION : This oxyhalide-based member is obtained by making portions thereof to be subjected to exposure to halogen-based corrosive gases or plasma thereof including fluorine-based ones and chlorine-based ones a sintered compact of the general formula LnZ3-2xOx (Ln is at least one of Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu; Z is at least one of F, Cl, Br, and I; 0
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