Sintering tool and method of manufacturing the same

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PROBLEM TO BE SOLVED : To provide a sintering jig excellent in mechanical strength and thermal shock resistance by forming the jig of a rate earth oxide sintered body having each a specified surface roughness, porosity and grain size. SOLUTION : A jig is formed of a rate earth oxide sintered body consisting of one or more kinds of Y, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, and its surface roughness Ra is <=50 μm, preferably, 5-25 μm, its porosity is <=20%, preferably, 5-20%, and the grain size is <=30 μm. The sintering jigs are used in a stacked condition, and they must be high in mechanical strength. In order to increase the mechanical strength, a smaller grain size is better, and a lower porosity is better. The sintering jigs are preferably resistant against rapid temperature rise and rapid cooling, and the thermal shock resistance must be high. In order to increase the thermal shock resistance, a smaller grain size is better, and a higher porosity is better.