LIQUID CRYSTAL DISPLAY PANEL, ITS MANUFACTURING METHOD, AND CU ALLOY SPUTTERING TARGET

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PROBLEM TO BE SOLVED : To provide a wiring material free from thermal defects such as hillock even after a heat treatment, having low electric resistance and capable of being directly layered on a transparent conductive film, to provide a large and high precise liquid crystal display panel, which is provided with a wiring using the wiring material and is excellent in productivity, to provide its manufacturing method, and to provide a Cu alloy sputtering target for forming the wiring.SOLUTION : At least one wiring comprises a Cu alloy thin film that contains at least one kind selected from rare earth elements as an additional element by 0.01 to 1 atomic% and the balance Cu and inevitable impurities, and that has a wiring structure directly layered on a transparent conductive film.COPYRIGHT : (C)2007, JPO&INPIT