ALUMINUM NITRIDE COMPOSITE BODY, AND MANUFACTURING METHOD OF THE SAME

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PURPOSE : Provided is an aluminum nitride composite body that is prepared at a lower bonding temperature and does not require a compression process during the manufacture of the composite. CONSTITUTION : The aluminum nitride composite body(21) comprises a thin, cylinder-shape adhesive body(23), a target adhesive body(27) with a support hole(25) into which a front end(23a) of the adhesive body(23) is screwed for bonding, and an adhesive layer(11) applied to a bottom face(29) of the support hole(25) of the target adhesive body(27). The adhesive layer(11) contains nitrogen, oxygen, aluminum, calcium, and less than 15wt.%% rare earth elements. The support hole(25) of the adhesive body(23) has an insertion hole(33) formed on the bottom face(29). The insertion hole(33) communicates with a through hole(31), so that a fluid including He gas from the top of the adhesive body(23) is fed to the insertion hole(33) via the through hole(31). © KIPO 2007