Thin permanent-magnet film and process for producing the same

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Refractory metal layers 2, 4, 6, 8, and 10, and rare earth alloy magnetic layers 3, 5, 7, 9, 11, and 12 are alternately deposited, so as to form a multilayer structure including four or more layers on a substrate. The refractory metal layers 2, 4, 6, 8, and 10 are formed from at least one kind of material selected from a group consisting of Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W, and each has a thickness of not less than 5 nm nor more than 50 nm. The rare earth alloy magnetic layers 3, 5, 7, 9, 11, and 12 have tetragonal R2Fe14B (R is Nd and/or Pr) as a primary constituent phase, and each has a thickness of not less than 50 nm nor more than 500 nm.