Blowout detection element

文件类型：PDF文档
文件大小：70K
PROBLEM TO BE SOLVED : To provide a ceramic-based diaphragm substrate which has excellent durability and high displacement property against large loads, even when the thickness of the substrate is small, and has linear deflection against the loads. SOLUTION : This diaphragm substrate 1 is characterized by comprising a silicon nitride-based ceramic having a thickness of =0.02 μm/KPa.