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Target for sputtering

2025-06-18 19:014900下载
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A sputtering target that is a perovskite oxide represented by the chemical formula of Ra1-xAxBO3-α (wherein Ra represents a rare earth element consisting of Y, Sc and lanthanoid; A represents Ca, Mg, Ba or Sr; B represents a transition metal element such as Mn, Fe, Ni, Co or Cr; and 0
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