CERIUM-BASED ABRASIVE MATERIAL

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PROBLEM TO BE SOLVED : To provide a cerium-based abrasive material having large grinding rate and causing few polishing defects whether F, La and Nd are contained or not, if CeO2/TREO is ≥40 mass%. SOLUTION : The cerium-base abrasive of CeO2/TREO≥40 mass% and having the intensity ratio B/A value of 0.20-0.80 and the specific surface area of 1-150 m2/g based on BET method is provided, wherein (a) is the peak based on (111) plane in peaks obtained by X-ray diffraction using Cu-Kα ray or Cu-Kα1 ray of rare earth oxide mainly composed of rare earth metal Ce and A is intensity thereof, and b is the peak based on (220) plane and B is intensity thereof. COPYRIGHT : (C)2007, JPO&INPIT