Method of manufacturing a silicon-containing precursors, the precursor itself and method for the pr

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Production of alkali-free amorphous silicon precursors comprises preparing alkali or alkaline earth oxysilicates and reacting them with an ammonium salt, washing and drying. Production of alkali-free amorphous silicon precursors comprises : preparing alkali or alkaline earth oxysilicates by reacting raw materials containing commercial silica with alkali/alkaline earth oxides/hydroxides or their mixtures and glycol/alcohols at 198-250 deg C for 2-48 hours to dissolve the silicates obtained in distilled water; and reacting with an ammonium salt selected from ammonium nitrate, ammonium acetate, ammonium carbonate, tetraalkylammonium salts with continuous stirring followed by repeated washing with water and drying to obtain the precursor.