MAGNETIC MULTILAYER FILM AND ITS MANUFACTURING METHOD

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PROBLEM TO BE SOLVED : To provide a magnetic multilayer film and its manufacturing method capable of obtaining high permeability at a high frequency, and also obtaining isotropic permeability without using complicated magnetic field generating equipment. SOLUTION : The magnetic multilayer film has a structure wherein at least two or more ferromagnetic metal layers and rare earth metal layers are laminated alternately. Film thicknesses of the ferromagnetic metal layers are 1 Å-100 Å, and respective film thicknesses of the rare earth metal layers are 2 Å-100 Å. This magnetic multilayer film is formed by repeating alternately a process for forming a thin film of a ferromagnetic metal with a film thickness within limits of 1 Å-100 Å, and a process for forming a thin film of a rare earth metal with a film thickness within limits of 2 Å-100 Å at least twice or more in a high vacuum of 10-5Pa or less. COPYRIGHT : (C)2007, JPO&INPIT