RARE EARTH METAL MEMBER, AND MAKING METHOD

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PROBLEM TO BE SOLVED : To provide a rare earth metal member having a high surface purity, a large grain size, minimized grain boundaries, and improved halogen resistance or corrosion resistance by using a rare earth metal containing not more than 100 ppm of at least one metal element other than the rare earth metal, machining the same into a member and cleaning the rare earth metal member after the machining with an organic acid-base capping agent. SOLUTION : The rare earth metal member is composed entirely of a rare earth metal, and contains not more than 100 ppm of at least one metal element other than the rare earth metal in a zone extending from the outermost surface to a depth of 2 μm. COPYRIGHT : (C)2007, JPO&INPIT