ALUMINUM NITRIDE-BASED CERAMIC, SEMICONDUCTOR MANUFACTURING MEMBER, AND METHOD FOR MANUFACTURING A

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PROBLEM TO BE SOLVED : To provide aluminum nitride-based ceramic having high corrosion resistance. SOLUTION : The aluminum nitride-based ceramic having grain boundary phases 2 including crystal phases containing at least one of rare earth elements or alkaline earth elements is provided with a grain boundary continuous layer of ≥5×104 μm/mm2 in the summation of length of center lines 3 of the grain boundary phases 2 and ≥1×102 pieces/mm2 in the number of branch points 4 of the center lines 3. COPYRIGHT : (C)2007, JPO&INPIT