CERIUM OXIDE ABRASIVES, PROCESS FOR PRODUCTION OF THE SAME, AND USE THEREOF

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Inexpensive cerium oxide abrasives which enable polishing at high speeds without flawing and can give high-accuracy polished surfaces having little surface roughness and which can be safely produced by a simple process; and a process for the production of the abrasives. Specifically, a process for the production of cerium oxide abrasives which comprises (a) the step of forming the first slurry containing particles of light rare earth salts by adding a precipitant to an aqueous solution of salts of cerium-containing light rare earth elements to precipitate the salts, (b) the step of forming the second slurry containing particles of light rare earth fluorides by adding a fluorinating agent to a slurry containing particles of light rare earth salts to react the salts with the fluorinating agent, (c) the step of mixing the first slurry with the second slurry to obtain a mixed slurry, and (d) the step of drying and baking the mixed slurry; and cerium oxide abrasives produced by the process.