METHOD FOR REPLENISHING GAS IN EXCIMER LASER DEVICE

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PROBLEM TO BE SOLVED : To prevent optimum composition balance from easily being lost in gas, even if replenishing of gas is repeated many times, to precisely determine a point of time for replenishing gas and the amount of gas to be replenished, to obtain a stable laser output, even if stopping lasers for a long time, and further, to automatically and eligibly inform the operator of the timing for exchanging gas and the timing of the maintenance. SOLUTION : In an excimer laser device for injecting a halogen gas, rare gas, and buffer gas into a laser chamber : oscillation stop time is calculated prior to laser oscillation; the amount of injection of the rare gas or the mixed gas of the buffer gas is calculated, based on the calculated oscillation stop time exceeds a prescribed one; and the mixed gas is injected by the calculated amount of injection prior to laser oscillation. COPYRIGHT : (C)2006, JPO&NCIPI