Laminated thin

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PROBLEM TO BE SOLVED : To provide a laminated thin film having satisfactory crystallinity and containing a single orientation metal thin film. SOLUTION : This laminated thin film has a metal thin film, which is an epitaxial film of cubic crystal (100) single orientation, and a buffer layer where a (111) facet surface is present on the interface which comes in contact with the metal thin film. The buffer layer contains zirconium oxide in which a rare- earth element oxide, zirconium oxide or a part of Zr is substituted with a rare- earth element or alkaline earth element.