RAW MATERIAL FOR CERIUM TYPE ABRASIVE AND MANUFACTURING METHOD OF RAW MATERIAL FOR CERIUM TYPE ABRAS

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PROBLEM TO BE SOLVED : To provide a raw material for a cerium type abrasive capable of forming a polished surface with a high accuracy, while keeping an polishing speed, by using a raw material for the cerium type abrasive in which a fluorine concentration is reduced. SOLUTION : The raw material for the cerium type abrasive contains content of cerium oxide of ≥30 mass% per the total rare earth oxide (TREO), fluorine concentration of ≤0.5 mass% per the TREO and further contains a rare earth compound including carbonate radical, and its sedimentation volume is ≥30 mL per 100 mL of the raw material slurry when the raw material slurry mixed with pure water to be made the TREO concentration of 126 g/L is settled for 10 min. The raw material for the abrasive preferably has a standing apparent specific volume of 1.0-3.0 mL/g after drying for 12 hr at 120°C and further content of a hexane extract measured by dissolving it in hydrochloric acid to be preferably to be ≤700 mass ppm based on the TREO. COPYRIGHT : (C)2006, JPO&NCIPI