Cathode member and its manufacturing method

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PROBLEM TO BE SOLVED : To provide a low-temperature operating cathode member and its manufacturing method facilitating connection of a nickel-chromium alloy to a cathode pellet which has been difficult in the past. SOLUTION : This cathode member is mounted with the cathode pellet 1 constituted of nickel powder, an emitter material, and rare earth oxide powder at one end of a cylindrical metal sleeve 2. The cathode pellet 1 has a nickel- chromium alloy film 3 formed by a film forming method such as sputtering on the back face side of its electron emitting face.