Device for recovering excimer laser gas

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PROBLEM TO BE SOLVED : To provide an excimer laser gas recovery device of a structure, wherein the total amount of deteriorated excimer laser gas is recovered, the removal of nitrogen gas which is used as sealing gas also can be executed efficiently by a dry vacuum pump for gas recovery, and expensive rare gas is reutilized effectively without wastefully exhausting the rare gas. SOLUTION : This device is provided with a halogen-removal cylinder 2 for removing halogens in an excimer laser gas which is exhausted from an excimer laser gas generating unit 1, a dry vacuum pump 4 for sucking the excimer laser gas, a nitrogen feeding means 5 for feeding sealing nitrogen gas, refining equipment 12 for separating nitrogen gas in recovery gas which is discharged from the pump 4 from the recovery gas, and a component gas replenishing part 22 for replenishing the recovery gas separated from the nitrogen gas with the component gas in the excimer laser gas.