The standard method of generating particles of nanometer size and its generation device

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PROBLEM TO BE SOLVED : To provide particles useful for standard particles for calibration of the grain size in the nanometer size area, a method for stably generating the particles in a simple procedure without being affected by the environment, and a generating apparatus therefor. SOLUTION : Atomic ions generated from the radioactive rare gas are generated by the radioactive disintegration of the radioactive nuclide under the reference gas atmosphere with a trace of water molecules removed therefrom.