MIXED RARE EARTH OXIDE, MIXED RARE EARTH FLUORIDE, CERIUM-BASED ABRASIVE USING THE MATERIALS AND P

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PROBLEM TO BE SOLVED : To provide an inexpensive method for producing a cerium-based abrasive exhibiting a rapid polishing speed and capable of keeping the rapid polishing speed over a long period by a simple production process. SOLUTION : The mixed rare earth oxide for the production of the cerium-based abrasive, in which the ignition loss after heating at a temperature of 1, 000°C for 1 hour is 0.5 mass% or less on the dry mass basis and the crystallite diameter is from 200 to 400 Å; the mixed rare earth fluoride for the production of a cerium-based abrasive, in which the ignition loss is from 3 to 15% on the dry mass basis; the process for producing the cerium-based abrasive from these mixed rare earth oxide or mixed rare earth fluoride; and the cerium-based abrasive produced by using these mixed rare earth oxide or mixed rare earth fluoride are provided. COPYRIGHT : (C)2006, JPO&NCIPI