ALUMINUM NITRIDE CERAMIC, MEMBER FOR PRODUCING SEMICONDUCTOR AND METHOD FOR PRODUCING ALUMINUM NITR

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PROBLEM TO BE SOLVED : To improve corrosion resistance, while maintaining the characteristics of aluminum nitride. SOLUTION : The aluminum nitride ceramic 10 comprises aluminum nitride particles and grain-boundary phases. Furthermore, the aluminum nitride ceramic 10 has a grain boundary phase-rich layer 12 containing more grain boundary phases in the surface layer than in the inner part 11. And the grain boundary phases in the grain boundary phase-rich layer 12 contains at least one kind element of rare earth elements or alkaline earth elements. COPYRIGHT : (C)2006, JPO&NCIPI