分享好友 知识库首页 频道列表

Gas injection head, method for manufacturing the same, semiconductor manufacturing device with the

2025-07-30 15:301760下载
文件类型:PDF文档
文件大小:861K
A gas injection head which is configured to jet a reactive gas includes a head surface. The gas injection head includes a nitride ceramic containing a rare earth compound which is present on the head surface.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0

loading