CLEANING GAS AND METHOD

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PROBLEM TO BE SOLVED : To provide a cleaning gas capable of improving cleaning effects by speeding up etching reaction in the cleaning gas containing fluorocarbon gas, and a cleaning method employing the cleaning gas. SOLUTION : At least one kind of gas among nitrogen trifluoride, fluorine, nitrous oxide, nitrogen, and rare gas is added in a range of ≤10% of the total gas amount into a mixed gas containing fluorocarbon gas and oxygen expressed by a general formula of CvHxFyOz (where v refers to an integer of 1 to 5, x refers to 0 or an integer of 1 to 3, y refers to an integer of 1 or larger, and z refers to 0 or 1).