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RARE-EARTH METAL COMPLEX, RAW MATERIAL FOR FORMING THIN FILM, AND METHOD FOR PRODUCING THIN FILM

2025-06-20 15:074030下载
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PROBLEM TO BE SOLVED : To provide a liquid rare-earth metal complex having excellent heat resistance and volatility, and suitable as a raw material for forming a thin film; and further to provide the raw material for forming the thin film, containing the rare-earth metal complex, and a method for producing the thin film by using the raw material for forming the thin film. SOLUTION : The tris(sec-butylcyclopentadienyl) complex of a rare earth metal represented by general formula (I) is provided.


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