PERMANENT MAGNET THIN FILM

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PROBLEM TO BE SOLVED : To provide a permanent magnet thin film having high residual magnetization in the in-plane direction. SOLUTION : In a permanent magnet thin film consisting of a magnetic layer 2 formed on the surface of a substrate 1, arithmetic average roughness Ra in the surface 1a of the substrate is 0.50-1000 μm. Root-mean-square gradient RΔq on surface of the substrate is 0.50-20. The permanent magnet thin film is an R-T-B system permanent magnet thin film, where R is one kind or more of rare earth element, T is Fe or one kind or more of transition metal element essential for Fe and Co, B is boron, a part of boron may be replaced by carbon, and R/T is atomic ratio of 0.18-0.40. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2019, JPO&INPIT