ALUMINIUM ALLOY SPUTTERING TARGET

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PROBLEM TO BE SOLVED : To provide an aluminium alloy sputtering target having an electric conductivity similar to that of a conventional aluminium alloy sputtering target and capable of reducing the occurrence of a flake. SOLUTION : An aluminium alloy sputtering target contains : at least one kind of an element selected from Ni, Cr, Fe, Co and Cu in 0.01 to 0.04 atomic% preferably 0.01 to 0.03 atomic%; and an element of at least one kind selected from rare earth elements other than La in 0.01 to 0.06 atomic%, preferably 0.03 to 0.05 atomic%, and the remainder is Al and an inevitable impurity. Said rare earth metal element is Y, Ce, Pr, Pm, Sm, Eu, Gd, Td, Dy and Yb. SELECTED DRAWING : None COPYRIGHT : (C)2018, JPO&INPIT