REFLECTION ELECTRODE AND Al ALLOY SPUTTERING TARGET

文件类型：PDF文档
文件大小：58K
PROBLEM TO BE SOLVED : To provide a reflection electrode which sufficiently reduces the driving voltage of an element of an organic EL display, an organic EL lighting, or the like and has high reflectance. SOLUTION : The reflection electrode comprising a reflection film made of an Al alloy and a transparent conductive film is configured such that : a main surface of the Al alloy of the reflection film and a main surface of the transparent conductive film are in contact with each other; and the Al alloy contains Zn at a ratio of 3-12 atom% and contains a rare earth element at a ratio of 0.01-0.5 atom%. SELECTED DRAWING : None COPYRIGHT : (C)2018, JPO&INPIT