RARE-EARTH OXIDE BASED MONOLITHIC CHAMBER MATERIAL

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PROBLEM TO BE SOLVED : To provide plasma-resistant chamber material. SOLUTION : A solid sintered ceramic article includes a solid solution comprising Y2O3 at concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article includes a solid solution comprising 40-100 molar % of Y2O3, 0-50 molar % of ZrO2, and 0-40 molar % of Al2O3. SELECTED DRAWING : Figure 2 COPYRIGHT : (C)2017, JPO&INPIT