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METAL OXIDE SEMICONDUCTOR THIN FILM, THIN FILM TRANSISTOR, AND THEIR FABRICATING METHODS, AND DIS

2025-06-20 11:572630下载
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A metal oxide semiconductor thin film, a thin film transistor (TFT), methods for fabricating the metal oxide semiconductor thin film and the TFT, and a display apparatus are provided. In some embodiments, the metal oxide semiconductor comprises : a first metal element, a second metal element and a third metal element, wherein : the first metal element is at least one of scandium, yttrium, aluminum, indium, and a rare earth element; the second metal element is at least one of calcium, strontium, and barium; and the third metal element is at least one of titanium and tin.


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