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The present invention relates to enhanced magnesium fluoride (MgF2) and lithium fluoride (LiF) over-coated aluminum (Al) mirrors, for far-ultraviolet (FUV) spectral region, and a method of making same. In addition, the present invention relates to rare-earth fluorides such as gadolinium fluoride (GdF2) and lutetium fluoride (LuF3) films, which are used as high-index layers, that when paired with the lower index MgF2, will provide multilayer coatings operable in the FUV spectral region.