PRODUCTION METHOD OF CONDUCTIVE DIAMOND ELECTRODE

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PROBLEM TO BE SOLVED : To increase a surface area of a diamond electrode, and further to obtain a conductive diamond electrode with high speed by doping the diamond with nitrogen. SOLUTION : In a production method of a diamond electrode, a nitrogen plasma jet is generated by using nitrogen as working gas at atmospheric pressure and making the nitrogen contain boron, hydrogen and/or a rare gas, and a surface of a diamond thin film is doped with boron and nitrogen and the surface area thereof is increased by making the surface of the diamond thin film irradiated with the nitrogen plasma jet. The diamond thin film may be doped with boron in advance. COPYRIGHT : (C)2016, JPO&INPIT