Manufacturing method of feed-through

文件类型：PDF文档
文件大小：438K
The present invention relates to a method for manufacturing a feed-through. The method for manufacturing the feed-through according to the embodiment of the present invention includes a first step of preparing a base (10), a second step of forming a plurality of electrodes (20) on the upper side of the base with a preset pattern, a third step of forming an insulation layer (30) to surround the electrode and the upper side of the base, a fourth step of forming a ground part (40), and a fifth step of forming a reception groove (50) and including an O-ring (60). The present invention easily manufactures the feed-through and forms a large number of electrodes. The O-ring prevents the pressure of a vacuum chamber or a high pressure chamber from being leaked to the outside.COPYRIGHT KIPO 2016