BULK ACOUSTIC WAVE RESONATOR HAVING DOPED PIEZOELECTRIC LAYER

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In accordance with a representative embodiment, a bulk acoustic wave (BAW) resonator comprises : a first electrode having a first electrode thickness; a second electrode having a second electrode thickness; and a piezoelectric layer having a piezoelectric layer thickness and being disposed between the first and second electrodes, wherein the piezoelectric layer includes a piezoelectric material doped with at least one rare earth element. As for a particular acoustic coupling coefficient (kt^2) value and a series resonance frequency (F_s) of the BAW resonator, the first electrode thickness and the second electrode thickness are respectively greater than a thickness of a first electrode and a thickness of a second electrode of a BAW resonator comprising an undoped piezoelectric layer.COPYRIGHT KIPO 2015