SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH TRACE EKEMENTS FOR IMPROVED DEFET TRACING AND METHODS OF

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The present invention relates to semiconductor manufacturing equipment comprising trace elements and method of manufacture. The semiconductor manufacturing equipment includes one or more components, wherein at least one component is made from an alloy comprising one or more materials and one or more rare earth elements (REEs). The alloy comprises predetermined quantities of the respective REEs. The method for manufacturing a component includes forming an alloy comprising at least one material and one or more selected rare earth elements (REEs) and making the component with the alloy.(605) Using semiconductor manufacturing equipment including rare earth elements(610) Forming an alloy by injecting the rare earth elements into a material(615) Forming components including the alloy(620) Checking separated particles(625) Checking whether the separated particles have the rare earth elements(630) Checking the potential failure factorsCOPYRIGHT KIPO 2014