The hydrogen sensor and its manufacturing method

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A hydrogen sensor (100) is provided with a substrate (2), a detection film (4) formed on the substrate (2), and a hydrogen permeable protective film (10) formed on the detection film (4). The detection film (4) is composed of a first ceramic (6) and rare-earth metal particles (8) dispersed in the first ceramic (6). The protective film (10) is composed of a second ceramic (12) and hydrogen permeable metal particles (14) dispersed in the second ceramic (12). Preferably, the thickness of the detection film (4) is 5 to 1, 000 nm, and the thickness of the hydrogen permeable protective film (10) is 5 to 40 nm.