TITANIUM OXIDE BASED VAPOR DEPOSITION MATERIAL AND MANUFACTURING METHOD OF THE SAME

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PROBLEM TO BE SOLVED : To provide a titanium oxide based sintered vapor deposition material which has the performance equal to a titanium oxide indicated by a composition formula TiOx (1.4≤x≤1.8), is inexpensive, and does not generate fine powder when handled. SOLUTION : The vapor deposition material is a sintered compact including a main component comprising the titanium oxide indicated by the composition formula TiOx (1.4≤x≤1.8) and a compound in a garnet structure, or is a sintered compact including the main component comprising the titanium oxide indicated by the composition formula TiOx (1.4≤x≤1.8) and at least one kind selected from yttrium oxide, aluminum oxide, zirconium oxide, hafnium oxide and ytterbium oxide. For the compound in the garnet structure, rare earth aluminum garnet is preferable. For the at least one kind selected from the aluminum oxide, the zirconium oxide, the hafnium oxide and the ytterbium oxide, the aluminum oxide is preferable. COPYRIGHT : (C)2012, JPO&INPIT