IIIOxNy ON REO/Si

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An insulative layer on a semiconductor substrate and a method of fabricating the structure includes the steps of depositing a single crystal layer of rare earth oxide on a semiconductor substrate to provide electrical insulation and thermal management. The rare earth oxide is crystal lattice matched to the substrate. A layer of single crystal IIIOxNy is formed in overlying relationship on the rare earth oxide by transitioning from the layer of rare earth oxide to a single crystal layer of IIIOxNy within a one wafer single epitaxial process. In the preferred embodiment the substrate is silicon, the rare earth oxide is Gd2O3, and the IIIOxNy includes AlOxNy.