The Method of heating and melting for high purity metal particles using QRD microwave in CVD furnace

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PURPOSE : A method of heating and melting particles or materials in a chemical vapor deposition reaction furnace with microwave is provided to significantly reduce costs associated with re-contamination of a product since packaging, transporting, and stringing processes are omitted.CONSTITUTION : A method of heating a reacting pipe comprises next steps. The reacting pipe(1) uses a ceramic-series of materials with a good high-temperature characteristic in a chemical vapor deposition method. The reacting pipe is made from high-insulation metallic material with a dielectric constant of 5 or greater at frequency of 1MHz. The reacting pipe is heated with QRD microwave systems(3A, 3B). The product formed on the inner surface of the reacting pipe is removed in a manner that an upper micro-system operates and the upper part of the reacting pipe is directly heated.COPYRIGHT KIPO 2012